Abstract: The textile material with the surface deposited with zinc oxide can increase its anti-ultraviolet property.In this paper,ZnO film was deposited on PET nonwovens substrates by RF magnetron sputtering.The morphology and the structure of the sputter-deposited film were characterized by atom force microscopy(AFM) and the energy-dispersive X-ray(EDX).The results showed that it formed a multi-layer film containing only two elements—Zn and O.The nano-scale ZnO in the film distributed evenly and compactly.The ultraviolet-visible photometer tests showed the ZnO film had good ultraviolet screening ability with little influence to the transmittance of visible sight.