关键词: 碳纤维布, 磁控溅射, 表面形貌, 沉积速率, 性能测试

Abstract: Nano-copper was deposited by RF magnetron sputtering on carbon fiber fabrics(CFFs) at room temperature. The composition and crystalline state of Cu film were analysed by X-ray diffraction (XRD) .The surface morphology of carbon fiber fabrics under different powers was respectively characterized by the methods of SEM. And then, the sputtering power on the deposition rate, fabric weight gain rate, electrical properties and fastness were studied. The results showed as follows: with the sputtering power increasing, copper particles on carbon fiber fabrics increased , the deposition rate increased, as well as the fabric weight gain rate and the electric conductivity of carbon fiber fabrics. After five cycles of thermal cycling experiments, the film was peeled and the film sheet resistance under 180 w increased significantly, indicating the film fastness decreased, therefore, reasonable sputtering power should be 60-140 w .

Key words: carbon fiber fabric, magnetron sprttering, surface morphology, deposition rate, performance testing