Abstract: In order to research and develop waterproof & moisture permeable PET fabric,fluorocarbon film was prepared on PET film and fabric by magnetron sputtering.Nanostructure and homogeneity of fluorocarbon film were characterized by scanning electron microscopy(SEM),X-ray diffraction(XRD),X-ray photoelectron spectroscopy(XPS).SEM shows that fluorocarbon film is in good orientation under certain conditions and has a character of network and rod-shaped nano self-assembly.Network structure of film was obtained for development of waterproof & moisture permeable fabrics.It is indicated by XRD that fluorocarbon film is partly crystallized.XPS shows that the ratio of F/C increases with the pressure increase