Abstract: In order to enhance the adsorption and filtration activity of textile on removing formaldehyde,nano-scale titanium dioxide TiO₂functional films were deposited on the surface of cotton fabric and polyester fabric by RF magnetron sputter coating process.The surface microstructure and morphology were characterized by scanning electron microscope(SEM) and X-ray diffraction(XRD).The photocatalytic degradation of formaldehyde of the two kinds of coated fabrics was also compared.The results showed that the morphology of TiO₂ functional film on the cotton fabric was quite dissimilar to that on the polyester fabric at the same process conditions.Also,nano-scale TiO₂ coated cotton fabric was superior to nano-scale TiO₂ coated polyester fabric in terms of formaldehyde removal efficiency.