Abstract: Nanoscale titanium dioxide (TiO2) functional films were prepared on the surface of nonwoven polyester fabric at room temperature by DC reactive magnetron sputtering process. The surface morphology and the structural properties of TiO2 films deposited under different sputtering powers were characterized by X-ray photoelectron spectroscopy, X-ray diffraction and atomic Force Microscope. The deposition rate and photocatalytic properties of the fabrics with TiO2 films prepared under different sputtering powers analyzed. The test results showed that the deposition rate and sputtering efficiency increased with increasing sputtering powers within a proper range, although it had little influence on the chemical structure of coated film. Furthermore, the sputtering powers increased led to the uniformity and compactness increasing of TiO2 films. The potocatalytic activity of the polyester nonwoven fabric with TiO2 films were enhanced by increasing the sputtering powers. But overhigh sputtering power led to overheating of target, not only decrease the deposition rate and the uniformity of TiO2 films, also damage the target.